Sheet resistance measurement roller SRMR-3
The SRMR-3 is a device for in-situ contact measurements of sheet resistance within a range of 5 -1000 (10,000) Ohm/sq. on polymer films in continuous technological process. A device can be used in vacuum and in air. Device SRMR-3 can be used in the systems of automatic control for deposition of the conducting coating with the assigned sheet resistance. The measurements are carried out continuously and are visualized in the PC display. SRMR-3 is formed of dielectric roller with copper contact rings, connected to a current collector. In the deposition cycle polymer film wraps the roller by 90º - 180º, touching the contact rings with coated side. In the process of measurements the polymer film must evenly fit closely to the roller. Sheet resistance is measured in 3 zones over film width. The measurements are carried out on alternating current. This allows eliminating interference from operating magnetron and others chamber devices. Current collector is connected to electronic unit via electrical vacuum feedthrough mounted on a flange. Electronic unit has an on/off toggle switch; printed control board; power supply; control input-output board; a few inputs for external connections; power cable. Electronic unit is connected with PC for measurements display via USB/ADC ports. Analogous output of the electronic unit can be switched from USB/ADC and PC over to ADC/PLC. |
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