PECVD pilot coater
PECVD Pilot Coater can be used as an experimentation tool for the optimization of roll-to-roll plasma enhanced CVD of functional coatings onto metal foils. The coating is deposited by an RF discharge. The deposition zone basically consists of an RF electrode inside a gas-tight space. Contamination-free conditions are provided in the deposition zones.The Coater is equipped with an entirely symmetrical reverse winding system. Pressure in each deposition zone can be varied independently by means of throttle valves in the pump lines. An automatic control system monitors and controls all specified process parameters. |
Technical Specifications Substrate: metal foils Foil width: 250-500 mm Foil thickness: 50-100 micron Maximum roll diameter: 300-600 mm Number of deposition zones: 8 Deposition equipment: 8 RF electrodes with RF generators and RF matching boxes Pretreatment: heating Foil temperature: + 160 ... + 250 °C Winding speed: 25-800 mm/min Overall dimensions: 9.3 x 8.5 x 5.0 m |
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