Web Coaters of this series can easily be updated to Customer's requirements and ensure deposition of single layers or multi-layer stacks for touch panels, LCD, solar cells and solar control materials; they may be also used for the deposition of thick conductive metallic layers for FPCBs.

The single-sided coatings are deposited in three isolated compartments with a water-cooled process drum in each of them. In-line monitoring of coating parameters after each deposition zone ensures accurate maintenance of each deposited layer properties. Vertical arrangement of sputtering targets decreases contamination risk of the targets and coated web. Depending on the process required, various combinations of magnetrons are possible: double magnetron systems or single magnetrons, powered from DC or AC power supplies. Target materials are metal or ceramic.

The sputtering process is monitored with a multi-channel plasma emission spectrometer.

The drums heating/cooling system provides the possibility of significant functionality expansion. Special attention is paid to film surface pretreatment. The web first undergoes drying in Vacuum dryer C2P670, and then plasma treatment in the Coater.

The control system provides a fully automated process.

Coater P600MR.5 for PCB applications	Sputtering magnetrons	3-drum system

Substrate: plastic webs
Web width: up to 700 mm
Web thickness: 25-200 micron
Maximum roll diameter: 600 mm
Number of compartments: 6
Coating: SiO2, ITO, TiO2, NiCr, Cu, TiN, Ti
Nominal sheet resistance (ITO layer): 40-400 Ohm/sq
Thickness of Cu layer: 0.2 micron
Sputter equipment: 3 planar double magnetron systems or 6 planar single magnetrons
Pre-treatment: glow discharge
Winding speed: 0.5 - 5.0 m/min
In-line monitoring: reflection, transmission and sheet resistance measurement
Drum temperature: - 10 ' + 25 degr.C
Pumping: based on turbo molecular or cryogenic pumps
Overall dimensions: 14.5x10.0x3.7 m