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Vacuum deposition machines and processes for: |
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Vacuum machines and processes for: |
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Components |
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Special equipment |
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Sidrabe, Inc.
Riga, Latvia LV-1073
Tel: +371 67249806
Fax: +371 67139506
E-mail: sidrabe@sidrabe.eu |
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| Webs/Metal webs/PECVD pilot coater |
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PECVD Pilot Coater can be used as an experimentation tool for the optimization of roll-to-roll plasma enhanced CVD of functional coatings onto metal foils. The coating is deposited by an RF discharge. The deposition zone basically consists of an RF electrode inside a gas-tight space.
Contamination-free conditions are provided in the deposition zones.The Coater is equipped with an entirely symmetrical reverse winding system. Pressure in each deposition zone can be varied independently by means of throttle valves in the pump lines.
An automatic control system monitors and controls all specified process parameters. |
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Technical Specifications
Substrate: metal foils
Foil width: 250-500 mm
Foil thickness: 50-100 micron
Maximum roll diameter: 300-600 mm
Number of deposition zones: 8
Deposition equipment: 8 RF electrodes with RF generators and RF matching boxes
Pretreatment: heating
Foil temperature: + 160 ... + 250 °C
Winding speed: 25-800 mm/min
Overall dimensions: 9.3 x 8.5 x 5.0 m |
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