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| Coater P600MR.5 for PCB applications |
Sputtering magnetrons |
3-drum system |
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Technical Specifications
Substrate: plastic webs
Web width: up to 700 mm
Web thickness: 25-200 micron
Maximum roll diameter: 600 mm
Number of compartments: 6
Coating: SiO2, ITO, TiO2, NiCr, Cu, TiN, Ti Nominal sheet resistance (ITO layer): 40-400 Ohm/sq
Thickness of Cu layer: 0.2 micron
Sputter equipment: 3 planar double magnetron systems or 6 planar single magnetrons
Pre-treatment: glow discharge Winding speed: 0.5-5.0 m/min
In-line monitoring: reflection, transmission and sheet resistance measurement
Drum temperature: - 10...+ 25 °C
Pumping: based on turbo molecular or cryogenic pumps
Overall dimensions: 14.5x10.0x3.7 m
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