Vacuum deposition machines and processes for:
Webs
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Glass
Glass pilot coater
In-line sputtering system
Powders
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Vacuum machines and processes for:
Solar materials
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Sputter magnetrons
Pretreatment devices
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Sheet resistance measurement roller
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Sidrabe, Inc.
Riga, Latvia LV-1073
Tel: +371 67249806
Fax: +371 67139506
E-mail: sidrabe@sidrabe.eu
Glass/Glass pilot coater

R&D Pilot Glass Coater is a vertical multipass sputter system, providing development of new PVD processes for subsequent embodiment in commercial projects. The system is flexible and easily customized for specific layer stacks. For that purpose it is equipped with:
  • Three isolated chambers with individual pumping
  • Reversal transportation system
  • Capability of single- or double-side deposition without opening the chambers· Planar or rotary cathodes
  • Glow discharge or ion beam sources
  • PEM for optimum process control
  • RGA for monitoring process environment
  • Gas admission system, adapted for various gases.

The Pilot Coater ensures deposition of various multi-layer systems onto flat substrates employing AC, DC and pulse magnetron sputtering.

R&D Pilot Glass Coater Coater with rotatable sputter magnetrons Coater with planar sputter magnetrons

Technical Specifications

Substrate: flat glass, metal foils, plastics
Dimensions: max 600 mm x 600 mm
Thickness: from 0.8 to 6 mm
Sputter sections: 2
Power supplies: DC (20 kW), AC (30 kW), pulse (10 kW)
Single planar magnetrons: up to 6
Single rotary magnetrons: 2
Coating: metals, alloys, oxides, nitrides
Pretreatment: glow discharge or ion beam source
Pumping: based on turbo molecular pumps
In-line monitoring of coating properties: refraction index, thickness
Copyright 2001-2008 Sidrabe, Inc.
Designed by dfm