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| R&D Pilot Glass Coater |
Coater with rotatable sputter magnetrons |
Coater with planar sputter magnetrons |
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Technical Specifications
Substrate: flat glass, metal foils, plastics
Dimensions: max 600 mm x 600 mm
Thickness: from 0.8 to 6 mm
Sputter sections: 2
Power supplies: DC (20 kW), AC (30 kW), pulse (10 kW) Single planar magnetrons: up to 6 Single rotary magnetrons: 2
Coating: metals, alloys, oxides, nitrides
Pretreatment: glow discharge or ion beam source
Pumping: based on turbo molecular pumps
In-line monitoring of coating properties: refraction index, thickness |
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