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Vacuum deposition machines and processes for: |
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Vacuum machines and processes for: |
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Components |
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Special equipment |
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Sidrabe, Inc.
Riga, Latvia LV-1073
Tel: +371 67249806
Fax: +371 67139506
E-mail:sidrabe@sidrabe.eu |
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| Webs/Metal webs/EB-evaporation coater |
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EB evaporation is the most versatile means of vacuum evaporation and deposition for metal foils and strips. This technique allows production of thin films of pure elements, numerous alloys and compounds. EB evaporation offers relatively high evaporation rates, sequential deposition and co-deposition.
Sidrabe’s EB evaporation roll-to-roll Coater is for single- or double-sided deposition of metals, alloys or oxides layers onto metal foils.
The coating is provided with EB evaporation devices from water-cooled crucibles with evaporated material replenishment. Controllable replenishment of evaporated material and sustaining of constant melt level on each EB gun ensure stability and repeatability of the deposition process, as well as the coating uniformity.
The deposition zone is arranged on 2 process drums of specific design, allowing effective cooling of the substrate. Each side of the substrate is pretreated with inverted magnetrons and sputter coated with an underlayer to stabilize the product characteristics. Variable tension winding of the substrate is possible.
Automatic control of each subsystem and the entire process is provided. |
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| EB evaporation coater |
Evaporation crucibles for one process drum |
Winding system |
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Technical Specifications
Substrate: stainless steel, Al and other metal foils
Foil width: up to 800 mm
Coating width: up to 750 mm
Foil thickness: 20-100 micron
Roll diameter: up to 300 mm
Number of compartments: 4
Number of deposition drums: 2
Temperature of the drums: - 40...+ 40 °C
Coating: Cu, Cr, Ti, Mo, Ni and other metals and alloys
Evaporators: from 6 to 12 EB-guns and water-cooled crucibles with evaporated material replenishment
Pre-treatment: inverted rotary magnetrons
Winding speed: 0.25 - 20 m/min
Pumping: based on cryogenic pumps
Overall dimensions: 3.6 x 3.0 x 2.1 m |
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